{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of N+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1157, "q": 1.79, "mu": 1.803, "epsilonL": 2.434e-05, "Eth": 28.26}, "E_min": 28.26, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.26	0.0	
33.38	0.0003545	
39.44	0.00169	
46.6	0.004758	
55.06	0.01068	
65.05	0.02086	
76.85	0.03671	
90.8	0.05901	
107.3	0.08735	
126.8	0.12	
149.8	0.1547	
176.9	0.1892	
209.0	0.2222	
247.0	0.2533	
291.8	0.2825	
344.8	0.3101	
407.3	0.3367	
481.2	0.3624	
568.6	0.3876	
671.8	0.4124	
793.7	0.4369	
937.7	0.4611	
1108.0	0.485	
1309.0	0.5085	
1546.0	0.5315	
1827.0	0.5538	
2159.0	0.5753	
2550.0	0.5958	
3013.0	0.615	
3560.0	0.6329	
4206.0	0.6492	
4970.0	0.6636	
5872.0	0.676	
6937.0	0.686	
8196.0	0.6935	
9683.0	0.6982	
11440.0	0.7	
13520.0	0.6987	
15970.0	0.6942	
18870.0	0.6864	
22290.0	0.6752	
26340.0	0.6608	
31120.0	0.6432	
36770.0	0.6227	
43440.0	0.5995	
51320.0	0.5739	
60630.0	0.5465	
71640.0	0.5175	
84640.0	0.4874	
-----