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Plasma-Surface Interaction Data Set 345

Sputtering of 4He+ on Mo(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Mo(pc) at 300 K

angle = 0.0 deg E /eV P
59.310.0
69.020.00069
80.320.001675
93.470.003024
108.80.004802
126.60.007057
147.30.00981
171.40.01304
199.50.01669
232.20.02064
270.20.02478
314.40.02895
365.90.03304
425.80.03694
495.50.04059
576.70.04392
671.10.04694
781.00.04963
908.90.05199
1058.00.05406
1231.00.05582
1432.00.0573
1667.00.05851
1940.00.05944
2258.00.06011
2627.00.06051
3057.00.06064
3558.00.06051
4140.00.06012
4818.00.05946
5607.00.05855
6526.00.0574
7594.00.056
8837.00.05439
10280.00.05258
11970.00.0506
13930.00.04846
16210.00.04621
18860.00.04385
21950.00.04144
25550.00.03899
29730.00.03654
34600.00.0341
40260.00.0317
46850.00.02937
54520.00.02711
63450.00.02494
73840.00.02288
85930.00.02092

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 59.31 – 100000