{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1537, "q": 0.1563, "mu": 0.9989, "epsilonL": 0.0001006, "Eth": 59.31}, "E_min": 59.31, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
59.31	0.0	
69.02	0.00069	
80.32	0.001675	
93.47	0.003024	
108.8	0.004802	
126.6	0.007057	
147.3	0.00981	
171.4	0.01304	
199.5	0.01669	
232.2	0.02064	
270.2	0.02478	
314.4	0.02895	
365.9	0.03304	
425.8	0.03694	
495.5	0.04059	
576.7	0.04392	
671.1	0.04694	
781.0	0.04963	
908.9	0.05199	
1058.0	0.05406	
1231.0	0.05582	
1432.0	0.0573	
1667.0	0.05851	
1940.0	0.05944	
2258.0	0.06011	
2627.0	0.06051	
3057.0	0.06064	
3558.0	0.06051	
4140.0	0.06012	
4818.0	0.05946	
5607.0	0.05855	
6526.0	0.0574	
7594.0	0.056	
8837.0	0.05439	
10280.0	0.05258	
11970.0	0.0506	
13930.0	0.04846	
16210.0	0.04621	
18860.0	0.04385	
21950.0	0.04144	
25550.0	0.03899	
29730.0	0.03654	
34600.0	0.0341	
40260.0	0.0317	
46850.0	0.02937	
54520.0	0.02711	
63450.0	0.02494	
73840.0	0.02288	
85930.0	0.02092	
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