Return to search

Plasma-Surface Interaction Data Set 344

Sputtering of 3He+ on Mo(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Mo(pc) at 300 K

angle = 0.0 deg E /eV P
75.40.0
87.320.0003323
101.10.0008108
117.10.001481
135.60.002395
157.00.003608
181.90.005174
210.60.007139
243.90.009531
282.40.01235
327.10.01556
378.80.01908
438.60.02281
508.00.02662
588.20.03039
681.20.034
788.90.03736
913.50.04041
1058.00.04311
1225.00.04545
1419.00.04743
1643.00.04906
1903.00.05036
2203.00.05135
2552.00.05204
2955.00.05244
3422.00.05256
3963.00.05243
4589.00.05204
5314.00.05142
6154.00.05057
7127.00.0495
8253.00.04824
9558.00.0468
11070.00.04519
12820.00.04345
14840.00.04159
17190.00.03964
19910.00.03762
23050.00.03556
26700.00.03348
30920.00.03139
35800.00.02933
41460.00.02731
48010.00.02534
55600.00.02344
64390.00.02161
74570.00.01987
86350.00.01822

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 75.4 – 100000