{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3541, "q": 0.1373, "mu": 0.9926, "epsilonL": 0.0001016, "Eth": 75.4}, "E_min": 75.4, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
75.4	0.0	
87.32	0.0003323	
101.1	0.0008108	
117.1	0.001481	
135.6	0.002395	
157.0	0.003608	
181.9	0.005174	
210.6	0.007139	
243.9	0.009531	
282.4	0.01235	
327.1	0.01556	
378.8	0.01908	
438.6	0.02281	
508.0	0.02662	
588.2	0.03039	
681.2	0.034	
788.9	0.03736	
913.5	0.04041	
1058.0	0.04311	
1225.0	0.04545	
1419.0	0.04743	
1643.0	0.04906	
1903.0	0.05036	
2203.0	0.05135	
2552.0	0.05204	
2955.0	0.05244	
3422.0	0.05256	
3963.0	0.05243	
4589.0	0.05204	
5314.0	0.05142	
6154.0	0.05057	
7127.0	0.0495	
8253.0	0.04824	
9558.0	0.0468	
11070.0	0.04519	
12820.0	0.04345	
14840.0	0.04159	
17190.0	0.03964	
19910.0	0.03762	
23050.0	0.03556	
26700.0	0.03348	
30920.0	0.03139	
35800.0	0.02933	
41460.0	0.02731	
48010.0	0.02534	
55600.0	0.02344	
64390.0	0.02161	
74570.0	0.01987	
86350.0	0.01822	
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