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Plasma-Surface Interaction Data Set 343

Sputtering of T+ on Mo(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Mo(pc) at 300 K

angle = 0.0 deg E /eV P
67.150.0
77.946.909e-05
90.480.0002704
105.00.0006632
121.90.001331
141.50.002367
164.30.003848
190.70.005796
221.30.008148
256.90.01075
298.20.0134
346.20.0159
401.90.01812
466.50.02
541.50.02154
628.60.02276
729.60.02371
846.90.02443
983.10.02496
1141.00.02532
1325.00.02552
1538.00.0256
1785.00.02554
2072.00.02537
2405.00.02508
2792.00.02469
3241.00.02419
3762.00.0236
4367.00.02291
5069.00.02215
5884.00.02132
6830.00.02042
7928.00.01948
9203.00.0185
10680.00.01749
12400.00.01648
14390.00.01545
16710.00.01444
19400.00.01344
22510.00.01247
26130.00.01153
30340.00.01063
35210.00.009763
40880.00.008944
47450.00.008172
55080.00.007448
63930.00.006772
74210.00.006143
86150.00.005561

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 67.15 – 100000