{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.5078, "q": 0.0661, "mu": 1.595, "epsilonL": 0.0002076, "Eth": 67.15}, "E_min": 67.15, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
67.15	0.0	
77.94	6.909e-05	
90.48	0.0002704	
105.0	0.0006632	
121.9	0.001331	
141.5	0.002367	
164.3	0.003848	
190.7	0.005796	
221.3	0.008148	
256.9	0.01075	
298.2	0.0134	
346.2	0.0159	
401.9	0.01812	
466.5	0.02	
541.5	0.02154	
628.6	0.02276	
729.6	0.02371	
846.9	0.02443	
983.1	0.02496	
1141.0	0.02532	
1325.0	0.02552	
1538.0	0.0256	
1785.0	0.02554	
2072.0	0.02537	
2405.0	0.02508	
2792.0	0.02469	
3241.0	0.02419	
3762.0	0.0236	
4367.0	0.02291	
5069.0	0.02215	
5884.0	0.02132	
6830.0	0.02042	
7928.0	0.01948	
9203.0	0.0185	
10680.0	0.01749	
12400.0	0.01648	
14390.0	0.01545	
16710.0	0.01444	
19400.0	0.01344	
22510.0	0.01247	
26130.0	0.01153	
30340.0	0.01063	
35210.0	0.009763	
40880.0	0.008944	
47450.0	0.008172	
55080.0	0.007448	
63930.0	0.006772	
74210.0	0.006143	
86150.0	0.005561	
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