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Plasma-Surface Interaction Data Set 342

Sputtering of D+ on Mo(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Mo(pc) at 300 K

angle = 0.0 deg E /eV P
97.770.0
112.67.817e-05
129.70.0002859
149.40.0006607
172.20.001247
198.30.002072
228.40.003128
263.10.004363
303.10.005684
349.20.006988
402.20.008188
463.30.009233
533.70.01011
614.80.01081
708.20.01137
815.80.01179
939.70.01211
1083.00.01234
1247.00.01249
1436.00.01257
1655.00.01258
1906.00.01254
2196.00.01244
2529.00.01229
2913.00.01209
3356.00.01184
3866.00.01155
4453.00.01123
5130.00.01086
5909.00.01047
6807.00.01005
7841.00.009609
9032.00.009152
10400.00.008682
11990.00.008206
13810.00.007728
15900.00.007252
18320.00.006783
21100.00.006324
24310.00.005878
28000.00.005447
32260.00.005033
37160.00.004639
42800.00.004265
49300.00.003912
56790.00.003579
65420.00.003269
75360.00.002979
86810.00.002709

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 97.77 – 100000