{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3241, "q": 0.0326, "mu": 1.541, "epsilonL": 0.0002098, "Eth": 97.77}, "E_min": 97.77, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
97.77	0.0	
112.6	7.817e-05	
129.7	0.0002859	
149.4	0.0006607	
172.2	0.001247	
198.3	0.002072	
228.4	0.003128	
263.1	0.004363	
303.1	0.005684	
349.2	0.006988	
402.2	0.008188	
463.3	0.009233	
533.7	0.01011	
614.8	0.01081	
708.2	0.01137	
815.8	0.01179	
939.7	0.01211	
1083.0	0.01234	
1247.0	0.01249	
1436.0	0.01257	
1655.0	0.01258	
1906.0	0.01254	
2196.0	0.01244	
2529.0	0.01229	
2913.0	0.01209	
3356.0	0.01184	
3866.0	0.01155	
4453.0	0.01123	
5130.0	0.01086	
5909.0	0.01047	
6807.0	0.01005	
7841.0	0.009609	
9032.0	0.009152	
10400.0	0.008682	
11990.0	0.008206	
13810.0	0.007728	
15900.0	0.007252	
18320.0	0.006783	
21100.0	0.006324	
24310.0	0.005878	
28000.0	0.005447	
32260.0	0.005033	
37160.0	0.004639	
42800.0	0.004265	
49300.0	0.003912	
56790.0	0.003579	
65420.0	0.003269	
75360.0	0.002979	
86810.0	0.002709	
-----