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Plasma-Surface Interaction Data Set 341

Sputtering of H+ on Mo(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Mo(pc) at 300 K

angle = 0.0 deg E /eV P
201.56.339e-22
228.76.362e-05
259.60.0001669
294.60.0003117
334.40.0005023
379.60.000741
430.90.001026
489.10.001351
555.10.001705
630.10.002071
715.20.002434
811.70.002777
921.40.003089
1046.00.003361
1187.00.00359
1347.00.003773
1529.00.003914
1736.00.004015
1970.00.00408
2236.00.004112
2538.00.004116
2881.00.004094
3270.00.00405
3712.00.003987
4213.00.003906
4782.00.003811
5428.00.003703
6161.00.003585
6993.00.003457
7938.00.003322
9010.00.003182
10230.00.003037
11610.00.00289
13180.00.002742
14950.00.002594
16970.00.002446
19270.00.002301
21870.00.002159
24820.00.002021
28170.00.001887
31980.00.001758
36300.00.001634
41200.00.001516
46760.00.001404
53080.00.001298
60250.00.001197
68380.00.001103
77620.00.001014
88100.00.0009315

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 201.5 – 100000