pwiDB

Plasma-Surface Interaction Data Set 340

Sputtering of Xe⁺ on Nb(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Nb(pc) at 300 K

angle = 0.0 deg	E /eV	P
	49.07	0.0
	57.33	7.979e-05
	66.97	0.0004379
	78.24	0.001354
	91.4	0.003306
	106.8	0.007083
	124.7	0.01392
	145.7	0.02562
	170.3	0.04461
	198.9	0.07377
	232.4	0.1158
	271.5	0.1723
	317.1	0.243
	370.5	0.3255
	432.8	0.4158
	505.6	0.5102
	590.7	0.606
	690.1	0.7017
	806.2	0.7972
	941.8	0.893
	1100.0	0.9901
	1285.0	1.089
	1502.0	1.191
	1754.0	1.297
	2049.0	1.407
	2394.0	1.522
	2797.0	1.642
	3268.0	1.767
	3817.0	1.897
	4460.0	2.032
	5210.0	2.172
	6087.0	2.317
	7111.0	2.466
	8307.0	2.619
	9705.0	2.776
	11340.0	2.935
	13250.0	3.097
	15470.0	3.26
	18080.0	3.424
	21120.0	3.588
	24670.0	3.751
	28820.0	3.912
	33670.0	4.07
	39340.0	4.223
	45950.0	4.371
	53690.0	4.513
	62720.0	4.647
	73270.0	4.771
	85600.0	4.885

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1998
q = 13.48
mu = 2.002
epsilonL = 1.19e-06
Eth = 49.07

Fit range

E = 49.07 – 100000