{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1998, "q": 13.48, "mu": 2.002, "epsilonL": 1.19e-06, "Eth": 49.07}, "E_min": 49.07, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
49.07	0.0	
57.33	7.979e-05	
66.97	0.0004379	
78.24	0.001354	
91.4	0.003306	
106.8	0.007083	
124.7	0.01392	
145.7	0.02562	
170.3	0.04461	
198.9	0.07377	
232.4	0.1158	
271.5	0.1723	
317.1	0.243	
370.5	0.3255	
432.8	0.4158	
505.6	0.5102	
590.7	0.606	
690.1	0.7017	
806.2	0.7972	
941.8	0.893	
1100.0	0.9901	
1285.0	1.089	
1502.0	1.191	
1754.0	1.297	
2049.0	1.407	
2394.0	1.522	
2797.0	1.642	
3268.0	1.767	
3817.0	1.897	
4460.0	2.032	
5210.0	2.172	
6087.0	2.317	
7111.0	2.466	
8307.0	2.619	
9705.0	2.776	
11340.0	2.935	
13250.0	3.097	
15470.0	3.26	
18080.0	3.424	
21120.0	3.588	
24670.0	3.751	
28820.0	3.912	
33670.0	4.07	
39340.0	4.223	
45950.0	4.371	
53690.0	4.513	
62720.0	4.647	
73270.0	4.771	
85600.0	4.885	
-----