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Plasma-Surface Interaction Data Set 339

Sputtering of Nb+ on Nb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Nb+ on Nb(pc) at 300 K

angle = 0.0 deg E /eV P
37.40.0
43.939.086e-05
51.610.0004619
60.630.001366
71.220.003237
83.670.006776
98.290.01307
115.50.02372
135.60.04087
159.30.06705
187.20.1048
219.90.1557
258.30.2199
303.50.2955
356.50.3792
418.80.4675
491.90.5575
577.90.6478
678.90.7379
797.50.828
936.90.9188
1101.01.011
1293.01.106
1519.01.203
1784.01.303
2096.01.408
2462.01.515
2893.01.627
3398.01.742
3992.01.861
4689.01.983
5509.02.108
6471.02.236
7602.02.366
8930.02.497
10490.02.628
12320.02.76
14480.02.891
17010.03.021
19980.03.148
23470.03.271
27570.03.39
32390.03.504
38050.03.611
44700.03.71
52510.03.801
61680.03.881
72460.03.95
85130.04.006

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 37.4 – 100000