{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "Nb+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Nb+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2284, "q": 10.45, "mu": 1.889, "epsilonL": 1.985e-06, "Eth": 37.4}, "E_min": 37.4, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
37.4	0.0	
43.93	9.086e-05	
51.61	0.0004619	
60.63	0.001366	
71.22	0.003237	
83.67	0.006776	
98.29	0.01307	
115.5	0.02372	
135.6	0.04087	
159.3	0.06705	
187.2	0.1048	
219.9	0.1557	
258.3	0.2199	
303.5	0.2955	
356.5	0.3792	
418.8	0.4675	
491.9	0.5575	
577.9	0.6478	
678.9	0.7379	
797.5	0.828	
936.9	0.9188	
1101.0	1.011	
1293.0	1.106	
1519.0	1.203	
1784.0	1.303	
2096.0	1.408	
2462.0	1.515	
2893.0	1.627	
3398.0	1.742	
3992.0	1.861	
4689.0	1.983	
5509.0	2.108	
6471.0	2.236	
7602.0	2.366	
8930.0	2.497	
10490.0	2.628	
12320.0	2.76	
14480.0	2.891	
17010.0	3.021	
19980.0	3.148	
23470.0	3.271	
27570.0	3.39	
32390.0	3.504	
38050.0	3.611	
44700.0	3.71	
52510.0	3.801	
61680.0	3.881	
72460.0	3.95	
85130.0	4.006	
-----