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Plasma-Surface Interaction Data Set 338

Sputtering of Kr+ on Nb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on Nb(pc) at 300 K

angle = 0.0 deg E /eV P
42.362.03e-34
49.640.0001078
58.160.0005903
68.150.001825
79.860.00446
93.570.00955
109.60.01871
128.50.03421
150.50.05888
176.40.09562
206.70.1464
242.20.2114
283.80.2882
332.50.3729
389.70.4612
456.60.55
535.00.6377
626.90.7241
734.60.8097
860.80.8953
1009.00.9818
1182.01.07
1385.01.16
1623.01.254
1901.01.35
2228.01.45
2611.01.552
3059.01.658
3584.01.767
4200.01.879
4921.01.992
5767.02.108
6757.02.226
7918.02.344
9278.02.463
10870.02.581
12740.02.699
14930.02.814
17490.02.927
20490.03.037
24010.03.142
28140.03.242
32970.03.336
38630.03.423
45270.03.501
53050.03.57
62160.03.629
72830.03.676
85340.03.711

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.36 – 100000