{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1964, "q": 9.559, "mu": 1.992, "epsilonL": 2.428e-06, "Eth": 42.36}, "E_min": 42.36, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
42.36	2.03e-34	
49.64	0.0001078	
58.16	0.0005903	
68.15	0.001825	
79.86	0.00446	
93.57	0.00955	
109.6	0.01871	
128.5	0.03421	
150.5	0.05888	
176.4	0.09562	
206.7	0.1464	
242.2	0.2114	
283.8	0.2882	
332.5	0.3729	
389.7	0.4612	
456.6	0.55	
535.0	0.6377	
626.9	0.7241	
734.6	0.8097	
860.8	0.8953	
1009.0	0.9818	
1182.0	1.07	
1385.0	1.16	
1623.0	1.254	
1901.0	1.35	
2228.0	1.45	
2611.0	1.552	
3059.0	1.658	
3584.0	1.767	
4200.0	1.879	
4921.0	1.992	
5767.0	2.108	
6757.0	2.226	
7918.0	2.344	
9278.0	2.463	
10870.0	2.581	
12740.0	2.699	
14930.0	2.814	
17490.0	2.927	
20490.0	3.037	
24010.0	3.142	
28140.0	3.242	
32970.0	3.336	
38630.0	3.423	
45270.0	3.501	
53050.0	3.57	
62160.0	3.629	
72830.0	3.676	
85340.0	3.711	
-----