pwiDB

Plasma-Surface Interaction Data Set 337

Sputtering of Ar⁺ on Nb(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Nb(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.6	3.109e-39
	33.79	8.144e-05
	39.91	0.0005781
	47.14	0.002116
	55.68	0.00588
	65.77	0.01393
	77.68	0.02938
	91.76	0.05609
	108.4	0.09716
	128.0	0.1527
	151.2	0.2187
	178.6	0.2889
	211.0	0.3581
	249.2	0.4236
	294.4	0.4852
	347.7	0.5441
	410.7	0.6015
	485.1	0.6587
	573.0	0.7163
	676.8	0.7752
	799.4	0.8355
	944.3	0.8975
	1115.0	0.9613
	1317.0	1.027
	1556.0	1.094
	1838.0	1.162
	2171.0	1.231
	2565.0	1.301
	3029.0	1.372
	3578.0	1.442
	4226.0	1.512
	4992.0	1.58
	5897.0	1.648
	6965.0	1.713
	8227.0	1.775
	9717.0	1.834
	11480.0	1.89
	13560.0	1.94
	16010.0	1.986
	18920.0	2.025
	22340.0	2.058
	26390.0	2.083
	31170.0	2.1
	36820.0	2.109
	43490.0	2.109
	51370.0	2.099
	60680.0	2.079
	71670.0	2.049
	84660.0	2.009

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1913
q = 5.395
mu = 2.303
epsilonL = 7.118e-06
Eth = 28.6

Fit range

E = 28.6 – 100000