{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1913, "q": 5.395, "mu": 2.303, "epsilonL": 7.118e-06, "Eth": 28.6}, "E_min": 28.6, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.6	3.109e-39	
33.79	8.144e-05	
39.91	0.0005781	
47.14	0.002116	
55.68	0.00588	
65.77	0.01393	
77.68	0.02938	
91.76	0.05609	
108.4	0.09716	
128.0	0.1527	
151.2	0.2187	
178.6	0.2889	
211.0	0.3581	
249.2	0.4236	
294.4	0.4852	
347.7	0.5441	
410.7	0.6015	
485.1	0.6587	
573.0	0.7163	
676.8	0.7752	
799.4	0.8355	
944.3	0.8975	
1115.0	0.9613	
1317.0	1.027	
1556.0	1.094	
1838.0	1.162	
2171.0	1.231	
2565.0	1.301	
3029.0	1.372	
3578.0	1.442	
4226.0	1.512	
4992.0	1.58	
5897.0	1.648	
6965.0	1.713	
8227.0	1.775	
9717.0	1.834	
11480.0	1.89	
13560.0	1.94	
16010.0	1.986	
18920.0	2.025	
22340.0	2.058	
26390.0	2.083	
31170.0	2.1	
36820.0	2.109	
43490.0	2.109	
51370.0	2.099	
60680.0	2.079	
71670.0	2.049	
84660.0	2.009	
-----