pwiDB

Plasma-Surface Interaction Data Set 336

Sputtering of Ne⁺ on Nb(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Nb(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.09	0.0
	33.19	0.0002648
	39.22	0.001308
	46.35	0.003781
	54.76	0.008712
	64.71	0.01753
	76.46	0.0319
	90.35	0.05329
	106.8	0.08223
	126.1	0.1178
	149.1	0.1578
	176.1	0.1994
	208.1	0.2406
	245.9	0.2802
	290.6	0.3178
	343.4	0.3537
	405.7	0.3883
	479.4	0.422
	566.5	0.4552
	669.4	0.4881
	790.9	0.521
	934.6	0.5539
	1104.0	0.5868
	1305.0	0.6196
	1542.0	0.6522
	1822.0	0.6845
	2153.0	0.7163
	2544.0	0.7474
	3006.0	0.7775
	3552.0	0.8064
	4197.0	0.8338
	4959.0	0.8594
	5860.0	0.883
	6924.0	0.9042
	8181.0	0.9227
	9667.0	0.9382
	11420.0	0.9503
	13500.0	0.9588
	15950.0	0.9634
	18850.0	0.9638
	22270.0	0.9599
	26310.0	0.9514
	31090.0	0.9383
	36740.0	0.9207
	43410.0	0.8986
	51300.0	0.8724
	60610.0	0.8422
	71620.0	0.8086
	84630.0	0.772

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1307
q = 2.465
mu = 1.844
epsilonL = 1.603e-05
Eth = 28.09

Fit range

E = 28.09 – 100000