{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ne+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1307, "q": 2.465, "mu": 1.844, "epsilonL": 1.603e-05, "Eth": 28.09}, "E_min": 28.09, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.09	0.0	
33.19	0.0002648	
39.22	0.001308	
46.35	0.003781	
54.76	0.008712	
64.71	0.01753	
76.46	0.0319	
90.35	0.05329	
106.8	0.08223	
126.1	0.1178	
149.1	0.1578	
176.1	0.1994	
208.1	0.2406	
245.9	0.2802	
290.6	0.3178	
343.4	0.3537	
405.7	0.3883	
479.4	0.422	
566.5	0.4552	
669.4	0.4881	
790.9	0.521	
934.6	0.5539	
1104.0	0.5868	
1305.0	0.6196	
1542.0	0.6522	
1822.0	0.6845	
2153.0	0.7163	
2544.0	0.7474	
3006.0	0.7775	
3552.0	0.8064	
4197.0	0.8338	
4959.0	0.8594	
5860.0	0.883	
6924.0	0.9042	
8181.0	0.9227	
9667.0	0.9382	
11420.0	0.9503	
13500.0	0.9588	
15950.0	0.9634	
18850.0	0.9638	
22270.0	0.9599	
26310.0	0.9514	
31090.0	0.9383	
36740.0	0.9207	
43410.0	0.8986	
51300.0	0.8724	
60610.0	0.8422	
71620.0	0.8086	
84630.0	0.772	
-----