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Plasma-Surface Interaction Data Set 335

Sputtering of 4He+ on Nb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Nb(pc) at 300 K

angle = 0.0 deg E /eV P
62.270.0
72.390.0002277
84.160.0007127
97.850.001519
113.80.002745
132.20.004493
153.70.006847
178.70.009841
207.80.01343
241.60.0175
280.90.02185
326.50.02625
379.60.03051
441.30.03448
513.10.03808
596.50.04126
693.50.04404
806.20.04643
937.30.04848
1090.00.05022
1267.00.05167
1473.00.05285
1712.00.05379
1991.00.05448
2314.00.05494
2691.00.05517
3128.00.05517
3637.00.05493
4228.00.05447
4915.00.05378
5714.00.05287
6643.00.05174
7723.00.05041
8979.00.0489
10440.00.04721
12140.00.04537
14110.00.04341
16400.00.04135
19070.00.03921
22170.00.03702
25770.00.03481
29970.00.03259
34840.00.0304
40500.00.02826
47090.00.02617
54740.00.02415
63640.00.02222
73990.00.02038
86020.00.01863

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 62.27 – 100000