{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2626, "q": 0.1418, "mu": 1.309, "epsilonL": 0.0001036, "Eth": 62.27}, "E_min": 62.27, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
62.27	0.0	
72.39	0.0002277	
84.16	0.0007127	
97.85	0.001519	
113.8	0.002745	
132.2	0.004493	
153.7	0.006847	
178.7	0.009841	
207.8	0.01343	
241.6	0.0175	
280.9	0.02185	
326.5	0.02625	
379.6	0.03051	
441.3	0.03448	
513.1	0.03808	
596.5	0.04126	
693.5	0.04404	
806.2	0.04643	
937.3	0.04848	
1090.0	0.05022	
1267.0	0.05167	
1473.0	0.05285	
1712.0	0.05379	
1991.0	0.05448	
2314.0	0.05494	
2691.0	0.05517	
3128.0	0.05517	
3637.0	0.05493	
4228.0	0.05447	
4915.0	0.05378	
5714.0	0.05287	
6643.0	0.05174	
7723.0	0.05041	
8979.0	0.0489	
10440.0	0.04721	
12140.0	0.04537	
14110.0	0.04341	
16400.0	0.04135	
19070.0	0.03921	
22170.0	0.03702	
25770.0	0.03481	
29970.0	0.03259	
34840.0	0.0304	
40500.0	0.02826	
47090.0	0.02617	
54740.0	0.02415	
63640.0	0.02222	
73990.0	0.02038	
86020.0	0.01863	
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