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Plasma-Surface Interaction Data Set 333

Sputtering of T+ on Nb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Nb(pc) at 300 K

angle = 0.0 deg E /eV P
68.822.788e-33
79.853.023e-05
92.640.0001481
107.50.0004193
124.70.0009401
144.70.00183
167.90.003204
194.80.005116
226.00.007498
262.20.01015
304.20.01279
352.90.01518
409.40.01721
475.00.01883
551.10.0201
639.40.02107
741.80.02179
860.70.02232
998.60.02269
1159.00.02292
1344.00.02303
1560.00.02304
1809.00.02293
2099.00.02273
2436.00.02244
2826.00.02205
3278.00.02157
3804.00.02102
4413.00.02038
5120.00.01968
5940.00.01892
6892.00.0181
7996.00.01725
9277.00.01637
10760.00.01546
12490.00.01455
14490.00.01364
16810.00.01273
19500.00.01185
22630.00.01098
26250.00.01015
30460.00.00935
35340.00.008587
41000.00.007865
47570.00.007184
55190.00.006546
64030.00.00595
74290.00.005397
86190.00.004885

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 68.82 – 100000