{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.6475, "q": 0.0593, "mu": 1.883, "epsilonL": 0.0002141, "Eth": 68.82}, "E_min": 68.82, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
68.82	2.788e-33	
79.85	3.023e-05	
92.64	0.0001481	
107.5	0.0004193	
124.7	0.0009401	
144.7	0.00183	
167.9	0.003204	
194.8	0.005116	
226.0	0.007498	
262.2	0.01015	
304.2	0.01279	
352.9	0.01518	
409.4	0.01721	
475.0	0.01883	
551.1	0.0201	
639.4	0.02107	
741.8	0.02179	
860.7	0.02232	
998.6	0.02269	
1159.0	0.02292	
1344.0	0.02303	
1560.0	0.02304	
1809.0	0.02293	
2099.0	0.02273	
2436.0	0.02244	
2826.0	0.02205	
3278.0	0.02157	
3804.0	0.02102	
4413.0	0.02038	
5120.0	0.01968	
5940.0	0.01892	
6892.0	0.0181	
7996.0	0.01725	
9277.0	0.01637	
10760.0	0.01546	
12490.0	0.01455	
14490.0	0.01364	
16810.0	0.01273	
19500.0	0.01185	
22630.0	0.01098	
26250.0	0.01015	
30460.0	0.00935	
35340.0	0.008587	
41000.0	0.007865	
47570.0	0.007184	
55190.0	0.006546	
64030.0	0.00595	
74290.0	0.005397	
86190.0	0.004885	
-----