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Plasma-Surface Interaction Data Set 332

Sputtering of D+ on Nb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Nb(pc) at 300 K

angle = 0.0 deg E /eV P
106.91.583e-27
122.97.49e-05
141.30.0002703
162.50.0006204
186.80.001168
214.80.001943
247.00.002948
284.00.004144
326.50.00545
375.50.006768
431.70.008005
496.40.0091
570.80.01002
656.30.01077
754.70.01136
867.70.01181
997.80.01215
1147.00.01238
1319.00.01252
1517.00.01259
1744.00.01259
2005.00.01252
2306.00.01241
2651.00.01224
3049.00.01202
3505.00.01176
4031.00.01145
4635.00.01111
5329.00.01074
6128.00.01034
7046.00.009908
8101.00.009462
9315.00.009002
10710.00.008533
12320.00.008059
14160.00.007584
16280.00.007114
18720.00.006652
21530.00.0062
24750.00.005762
28460.00.005339
32730.00.004935
37630.00.004549
43270.00.004184
49750.00.003839
57210.00.003515
65780.00.003212
75640.00.002929
86970.00.002666

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 106.9 – 100000