{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Nb", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Nb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3858, "q": 0.0328, "mu": 1.525, "epsilonL": 0.0002163, "Eth": 106.9}, "E_min": 106.9, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
106.9	1.583e-27	
122.9	7.49e-05	
141.3	0.0002703	
162.5	0.0006204	
186.8	0.001168	
214.8	0.001943	
247.0	0.002948	
284.0	0.004144	
326.5	0.00545	
375.5	0.006768	
431.7	0.008005	
496.4	0.0091	
570.8	0.01002	
656.3	0.01077	
754.7	0.01136	
867.7	0.01181	
997.8	0.01215	
1147.0	0.01238	
1319.0	0.01252	
1517.0	0.01259	
1744.0	0.01259	
2005.0	0.01252	
2306.0	0.01241	
2651.0	0.01224	
3049.0	0.01202	
3505.0	0.01176	
4031.0	0.01145	
4635.0	0.01111	
5329.0	0.01074	
6128.0	0.01034	
7046.0	0.009908	
8101.0	0.009462	
9315.0	0.009002	
10710.0	0.008533	
12320.0	0.008059	
14160.0	0.007584	
16280.0	0.007114	
18720.0	0.006652	
21530.0	0.0062	
24750.0	0.005762	
28460.0	0.005339	
32730.0	0.004935	
37630.0	0.004549	
43270.0	0.004184	
49750.0	0.003839	
57210.0	0.003515	
65780.0	0.003212	
75640.0	0.002929	
86970.0	0.002666	
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