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Plasma-Surface Interaction Data Set 330

Sputtering of Xe+ on Zr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Zr(pc) at 300 K

angle = 0.0 deg E /eV P
37.830.0
44.432.952e-05
52.180.0001954
61.280.0006835
71.980.001843
84.530.0043
99.280.00913
116.60.01805
136.90.03357
160.80.05889
188.90.09718
221.90.1504
260.60.2177
306.00.2958
359.40.3799
422.10.4657
495.80.5511
582.30.6354
683.80.7193
803.10.8039
943.30.8902
1108.00.9794
1301.01.072
1528.01.17
1795.01.272
2108.01.379
2476.01.492
2907.01.611
3415.01.735
4010.01.864
4710.01.999
5532.02.139
6497.02.284
7631.02.433
8962.02.585
10530.02.741
12360.02.9
14520.03.061
17050.03.222
20030.03.384
23520.03.544
27620.03.703
32440.03.859
38100.04.011
44750.04.158
52560.04.297
61730.04.429
72500.04.552
85150.04.663

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 37.83 – 100000