{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2943, "q": 12.84, "mu": 2.228, "epsilonL": 1.211e-06, "Eth": 37.83}, "E_min": 37.83, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
37.83	0.0	
44.43	2.952e-05	
52.18	0.0001954	
61.28	0.0006835	
71.98	0.001843	
84.53	0.0043	
99.28	0.00913	
116.6	0.01805	
136.9	0.03357	
160.8	0.05889	
188.9	0.09718	
221.9	0.1504	
260.6	0.2177	
306.0	0.2958	
359.4	0.3799	
422.1	0.4657	
495.8	0.5511	
582.3	0.6354	
683.8	0.7193	
803.1	0.8039	
943.3	0.8902	
1108.0	0.9794	
1301.0	1.072	
1528.0	1.17	
1795.0	1.272	
2108.0	1.379	
2476.0	1.492	
2907.0	1.611	
3415.0	1.735	
4010.0	1.864	
4710.0	1.999	
5532.0	2.139	
6497.0	2.284	
7631.0	2.433	
8962.0	2.585	
10530.0	2.741	
12360.0	2.9	
14520.0	3.061	
17050.0	3.222	
20030.0	3.384	
23520.0	3.544	
27620.0	3.703	
32440.0	3.859	
38100.0	4.011	
44750.0	4.158	
52560.0	4.297	
61730.0	4.429	
72500.0	4.552	
85150.0	4.663	
-----