pwiDB

Plasma-Surface Interaction Data Set 328

Sputtering of Kr⁺ on Zr(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Zr(pc) at 300 K

angle = 0.0 deg	E /eV	P
	33.58	0.0
	39.53	6.238e-05
	46.54	0.00039
	54.8	0.001317
	64.51	0.00345
	75.95	0.007841
	89.42	0.01618
	105.3	0.03095
	123.9	0.05525
	145.9	0.09214
	171.8	0.1433
	202.3	0.2077
	238.1	0.2818
	280.4	0.3607
	330.1	0.4405
	388.6	0.5192
	457.5	0.5961
	538.7	0.6721
	634.2	0.748
	746.6	0.825
	879.0	0.9039
	1035.0	0.9854
	1218.0	1.07
	1434.0	1.158
	1689.0	1.25
	1988.0	1.345
	2341.0	1.445
	2756.0	1.547
	3245.0	1.653
	3820.0	1.763
	4497.0	1.874
	5295.0	1.989
	6234.0	2.105
	7339.0	2.222
	8641.0	2.34
	10170.0	2.457
	11980.0	2.574
	14100.0	2.69
	16600.0	2.803
	19540.0	2.912
	23010.0	3.018
	27090.0	3.118
	31900.0	3.212
	37550.0	3.299
	44210.0	3.377
	52050.0	3.445
	61280.0	3.503
	72150.0	3.55
	84940.0	3.583

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2163
q = 9.224
mu = 2.148
epsilonL = 2.477e-06
Eth = 33.58

Fit range

E = 33.58 – 100000