{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2163, "q": 9.224, "mu": 2.148, "epsilonL": 2.477e-06, "Eth": 33.58}, "E_min": 33.58, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
33.58	0.0	
39.53	6.238e-05	
46.54	0.00039	
54.8	0.001317	
64.51	0.00345	
75.95	0.007841	
89.42	0.01618	
105.3	0.03095	
123.9	0.05525	
145.9	0.09214	
171.8	0.1433	
202.3	0.2077	
238.1	0.2818	
280.4	0.3607	
330.1	0.4405	
388.6	0.5192	
457.5	0.5961	
538.7	0.6721	
634.2	0.748	
746.6	0.825	
879.0	0.9039	
1035.0	0.9854	
1218.0	1.07	
1434.0	1.158	
1689.0	1.25	
1988.0	1.345	
2341.0	1.445	
2756.0	1.547	
3245.0	1.653	
3820.0	1.763	
4497.0	1.874	
5295.0	1.989	
6234.0	2.105	
7339.0	2.222	
8641.0	2.34	
10170.0	2.457	
11980.0	2.574	
14100.0	2.69	
16600.0	2.803	
19540.0	2.912	
23010.0	3.018	
27090.0	3.118	
31900.0	3.212	
37550.0	3.299	
44210.0	3.377	
52050.0	3.445	
61280.0	3.503	
72150.0	3.55	
84940.0	3.583	
-----