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Plasma-Surface Interaction Data Set 326

Sputtering of Ne+ on Zr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne+ on Zr(pc) at 300 K

angle = 0.0 deg E /eV P
23.462.324e-29
27.820.0003851
32.990.001688
39.130.004529
46.410.009861
55.040.01895
65.280.0332
77.420.05381
91.810.08123
108.90.1148
129.10.1528
153.20.193
181.60.2337
215.40.2736
255.50.3122
303.00.3496
359.30.3859
426.20.4216
505.40.4568
599.40.4918
710.90.5269
843.10.5619
999.90.597
1186.00.6321
1406.00.667
1668.00.7017
1978.00.7358
2346.00.7693
2782.00.8017
3300.00.833
3913.00.8627
4641.00.8905
5504.00.9162
6528.00.9393
7742.00.9596
9182.00.9766
10890.00.9901
12910.00.9996
15320.01.005
18170.01.006
21540.01.002
25550.00.9927
30300.00.9788
35940.00.9599
42620.00.9362
50550.00.9079
59950.00.8754
71100.00.8392
84320.00.7998

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 23.46 – 100000