{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1101, "q": 2.572, "mu": 1.685, "epsilonL": 1.648e-05, "Eth": 23.46}, "E_min": 23.46, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.46	2.324e-29	
27.82	0.0003851	
32.99	0.001688	
39.13	0.004529	
46.41	0.009861	
55.04	0.01895	
65.28	0.0332	
77.42	0.05381	
91.81	0.08123	
108.9	0.1148	
129.1	0.1528	
153.2	0.193	
181.6	0.2337	
215.4	0.2736	
255.5	0.3122	
303.0	0.3496	
359.3	0.3859	
426.2	0.4216	
505.4	0.4568	
599.4	0.4918	
710.9	0.5269	
843.1	0.5619	
999.9	0.597	
1186.0	0.6321	
1406.0	0.667	
1668.0	0.7017	
1978.0	0.7358	
2346.0	0.7693	
2782.0	0.8017	
3300.0	0.833	
3913.0	0.8627	
4641.0	0.8905	
5504.0	0.9162	
6528.0	0.9393	
7742.0	0.9596	
9182.0	0.9766	
10890.0	0.9901	
12910.0	0.9996	
15320.0	1.005	
18170.0	1.006	
21540.0	1.002	
25550.0	0.9927	
30300.0	0.9788	
35940.0	0.9599	
42620.0	0.9362	
50550.0	0.9079	
59950.0	0.8754	
71100.0	0.8392	
84320.0	0.7998	
-----