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Plasma-Surface Interaction Data Set 325

Sputtering of 4He+ on Zr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Zr(pc) at 300 K

angle = 0.0 deg E /eV P
53.170.0
62.020.0003754
72.330.0008956
84.360.001617
98.40.002593
114.80.003879
133.90.005529
156.10.007581
182.10.01006
212.40.01294
247.70.01618
288.90.0197
336.90.02338
393.00.02711
458.40.03076
534.60.03424
623.50.03748
727.20.04042
848.20.04304
989.30.04534
1154.00.0473
1346.00.04896
1570.00.0503
1831.00.05135
2135.00.05212
2490.00.05261
2905.00.05283
3388.00.05278
3951.00.05248
4608.00.05193
5375.00.05113
6269.00.0501
7312.00.04886
8528.00.04741
9946.00.04578
11600.00.044
13530.00.04208
15780.00.04006
18410.00.03795
21470.00.0358
25040.00.03361
29200.00.03143
34060.00.02927
39720.00.02716
46330.00.0251
54040.00.02312
63030.00.02122
73510.00.01942
85740.00.01771

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 53.17 – 100000