{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2633, "q": 0.1371, "mu": 0.9538, "epsilonL": 0.0001069, "Eth": 53.17}, "E_min": 53.17, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
53.17	0.0	
62.02	0.0003754	
72.33	0.0008956	
84.36	0.001617	
98.4	0.002593	
114.8	0.003879	
133.9	0.005529	
156.1	0.007581	
182.1	0.01006	
212.4	0.01294	
247.7	0.01618	
288.9	0.0197	
336.9	0.02338	
393.0	0.02711	
458.4	0.03076	
534.6	0.03424	
623.5	0.03748	
727.2	0.04042	
848.2	0.04304	
989.3	0.04534	
1154.0	0.0473	
1346.0	0.04896	
1570.0	0.0503	
1831.0	0.05135	
2135.0	0.05212	
2490.0	0.05261	
2905.0	0.05283	
3388.0	0.05278	
3951.0	0.05248	
4608.0	0.05193	
5375.0	0.05113	
6269.0	0.0501	
7312.0	0.04886	
8528.0	0.04741	
9946.0	0.04578	
11600.0	0.044	
13530.0	0.04208	
15780.0	0.04006	
18410.0	0.03795	
21470.0	0.0358	
25040.0	0.03361	
29200.0	0.03143	
34060.0	0.02927	
39720.0	0.02716	
46330.0	0.0251	
54040.0	0.02312	
63030.0	0.02122	
73510.0	0.01942	
85740.0	0.01771	
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