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Plasma-Surface Interaction Data Set 324

Sputtering of 3He+ on Zr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Zr(pc) at 300 K

angle = 0.0 deg E /eV P
66.790.0
77.540.0002546
90.020.0005291
104.50.00088
121.30.001334
140.80.001919
163.50.002667
189.80.003609
220.40.004779
255.80.00621
297.00.007925
344.80.009939
400.30.01225
464.70.01483
539.50.01764
626.30.02062
727.00.02367
844.00.02671
979.90.02966
1138.00.03242
1321.00.03494
1533.00.03718
1780.00.03909
2066.00.04066
2399.00.04189
2785.00.04279
3233.00.04337
3753.00.04364
4357.00.04361
5058.00.04332
5872.00.04277
6817.00.04199
7914.00.041
9187.00.03982
10670.00.03847
12380.00.03699
14370.00.03539
16690.00.0337
19370.00.03195
22490.00.03016
26110.00.02834
30310.00.02653
35190.00.02474
40850.00.02299
47420.00.02128
55050.00.01964
63910.00.01807
74200.00.01657
86140.00.01516

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 66.79 – 100000