{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.5744, "q": 0.1184, "mu": 0.7719, "epsilonL": 0.000108, "Eth": 66.79}, "E_min": 66.79, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
66.79	0.0	
77.54	0.0002546	
90.02	0.0005291	
104.5	0.00088	
121.3	0.001334	
140.8	0.001919	
163.5	0.002667	
189.8	0.003609	
220.4	0.004779	
255.8	0.00621	
297.0	0.007925	
344.8	0.009939	
400.3	0.01225	
464.7	0.01483	
539.5	0.01764	
626.3	0.02062	
727.0	0.02367	
844.0	0.02671	
979.9	0.02966	
1138.0	0.03242	
1321.0	0.03494	
1533.0	0.03718	
1780.0	0.03909	
2066.0	0.04066	
2399.0	0.04189	
2785.0	0.04279	
3233.0	0.04337	
3753.0	0.04364	
4357.0	0.04361	
5058.0	0.04332	
5872.0	0.04277	
6817.0	0.04199	
7914.0	0.041	
9187.0	0.03982	
10670.0	0.03847	
12380.0	0.03699	
14370.0	0.03539	
16690.0	0.0337	
19370.0	0.03195	
22490.0	0.03016	
26110.0	0.02834	
30310.0	0.02653	
35190.0	0.02474	
40850.0	0.02299	
47420.0	0.02128	
55050.0	0.01964	
63910.0	0.01807	
74200.0	0.01657	
86140.0	0.01516	
-----