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Plasma-Surface Interaction Data Set 323

Sputtering of T+ on Zr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Zr(pc) at 300 K

angle = 0.0 deg E /eV P
54.990.0
64.093.275e-05
74.70.0001362
87.060.0003498
101.50.0007328
118.30.00136
137.80.002313
160.70.003652
187.30.005385
218.30.007437
254.40.009655
296.50.01186
345.60.01388
402.80.01563
469.50.01708
547.20.01824
637.80.01914
743.30.01983
866.40.02033
1010.00.02068
1177.00.0209
1372.00.021
1599.00.02098
1864.00.02086
2172.00.02065
2532.00.02033
2951.00.01993
3439.00.01945
4008.00.01888
4672.00.01825
5445.00.01755
6347.00.0168
7397.00.01601
8622.00.01519
10050.00.01434
11710.00.01348
13650.00.01262
15910.00.01177
18540.00.01093
21610.00.01011
25190.00.009325
29360.00.008569
34220.00.00785
39890.00.00717
46490.00.006531
54190.00.005932
63160.00.005376
73610.00.00486
85800.00.004384

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 54.99 – 100000