{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.7209, "q": 0.0542, "mu": 1.659, "epsilonL": 0.000221, "Eth": 54.99}, "E_min": 54.99, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
54.99	0.0	
64.09	3.275e-05	
74.7	0.0001362	
87.06	0.0003498	
101.5	0.0007328	
118.3	0.00136	
137.8	0.002313	
160.7	0.003652	
187.3	0.005385	
218.3	0.007437	
254.4	0.009655	
296.5	0.01186	
345.6	0.01388	
402.8	0.01563	
469.5	0.01708	
547.2	0.01824	
637.8	0.01914	
743.3	0.01983	
866.4	0.02033	
1010.0	0.02068	
1177.0	0.0209	
1372.0	0.021	
1599.0	0.02098	
1864.0	0.02086	
2172.0	0.02065	
2532.0	0.02033	
2951.0	0.01993	
3439.0	0.01945	
4008.0	0.01888	
4672.0	0.01825	
5445.0	0.01755	
6347.0	0.0168	
7397.0	0.01601	
8622.0	0.01519	
10050.0	0.01434	
11710.0	0.01348	
13650.0	0.01262	
15910.0	0.01177	
18540.0	0.01093	
21610.0	0.01011	
25190.0	0.009325	
29360.0	0.008569	
34220.0	0.00785	
39890.0	0.00717	
46490.0	0.006531	
54190.0	0.005932	
63160.0	0.005376	
73610.0	0.00486	
85800.0	0.004384	
-----