Return to search

Plasma-Surface Interaction Data Set 322

Sputtering of D+ on Zr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Zr(pc) at 300 K

angle = 0.0 deg E /eV P
80.120.0
92.661.466e-05
107.27.775e-05
124.00.0002307
143.40.0005337
165.80.001061
191.80.001878
221.80.003004
256.60.004372
296.80.005837
343.30.007232
397.00.008441
459.20.009419
531.10.01018
614.30.01074
710.50.01116
821.80.01146
950.50.01167
1099.00.01181
1272.00.01188
1471.00.01189
1701.00.01184
1967.00.01175
2276.00.01161
2632.00.01142
3044.00.01119
3521.00.01092
4072.00.0106
4710.00.01026
5448.00.009881
6301.00.009478
7288.00.009053
8429.00.008611
9749.00.008157
11280.00.007698
13040.00.007236
15080.00.006777
17450.00.006324
20180.00.005882
23340.00.005453
27000.00.00504
31220.00.004644
36110.00.004268
41770.00.003911
48310.00.003576
55880.00.003262
64630.00.002969
74750.00.002696
86460.00.002444

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 80.12 – 100000