{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Zr", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on Zr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.6485, "q": 0.0306, "mu": 1.994, "epsilonL": 0.0002234, "Eth": 80.12}, "E_min": 80.12, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
80.12	0.0	
92.66	1.466e-05	
107.2	7.775e-05	
124.0	0.0002307	
143.4	0.0005337	
165.8	0.001061	
191.8	0.001878	
221.8	0.003004	
256.6	0.004372	
296.8	0.005837	
343.3	0.007232	
397.0	0.008441	
459.2	0.009419	
531.1	0.01018	
614.3	0.01074	
710.5	0.01116	
821.8	0.01146	
950.5	0.01167	
1099.0	0.01181	
1272.0	0.01188	
1471.0	0.01189	
1701.0	0.01184	
1967.0	0.01175	
2276.0	0.01161	
2632.0	0.01142	
3044.0	0.01119	
3521.0	0.01092	
4072.0	0.0106	
4710.0	0.01026	
5448.0	0.009881	
6301.0	0.009478	
7288.0	0.009053	
8429.0	0.008611	
9749.0	0.008157	
11280.0	0.007698	
13040.0	0.007236	
15080.0	0.006777	
17450.0	0.006324	
20180.0	0.005882	
23340.0	0.005453	
27000.0	0.00504	
31220.0	0.004644	
36110.0	0.004268	
41770.0	0.003911	
48310.0	0.003576	
55880.0	0.003262	
64630.0	0.002969	
74750.0	0.002696	
86460.0	0.002444	
-----