pwiDB

Plasma-Surface Interaction Data Set 320

Sputtering of Ar⁺ on Se(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Se(pc) at 300 K

angle = 0.0 deg	E /eV	P
	9.078	0.0
	10.98	0.0001253
	13.27	0.0008682
	16.05	0.003189
	19.41	0.008982
	23.47	0.02162
	28.38	0.04624
	34.31	0.08886
	41.49	0.1535
	50.17	0.2385
	60.66	0.3365
	73.35	0.4389
	88.69	0.5401
	107.2	0.6387
	129.7	0.7357
	156.8	0.8332
	189.6	0.933
	229.3	1.037
	277.2	1.146
	335.2	1.26
	405.3	1.381
	490.1	1.509
	592.6	1.643
	716.6	1.783
	866.5	1.929
	1048.0	2.08
	1267.0	2.237
	1532.0	2.397
	1852.0	2.56
	2240.0	2.725
	2708.0	2.891
	3275.0	3.056
	3960.0	3.22
	4788.0	3.379
	5790.0	3.533
	7001.0	3.681
	8465.0	3.819
	10240.0	3.946
	12380.0	4.061
	14970.0	4.16
	18100.0	4.242
	21880.0	4.304
	26460.0	4.345
	31990.0	4.363
	38690.0	4.356
	46780.0	4.323
	56560.0	4.263
	68390.0	4.176
	82700.0	4.063

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1608
q = 11.16
mu = 2.208
epsilonL = 8.472e-06
Eth = 9.078

Fit range

E = 9.078 – 100000