{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Se", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Se(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1608, "q": 11.16, "mu": 2.208, "epsilonL": 8.472e-06, "Eth": 9.078}, "E_min": 9.078, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
9.078	0.0	
10.98	0.0001253	
13.27	0.0008682	
16.05	0.003189	
19.41	0.008982	
23.47	0.02162	
28.38	0.04624	
34.31	0.08886	
41.49	0.1535	
50.17	0.2385	
60.66	0.3365	
73.35	0.4389	
88.69	0.5401	
107.2	0.6387	
129.7	0.7357	
156.8	0.8332	
189.6	0.933	
229.3	1.037	
277.2	1.146	
335.2	1.26	
405.3	1.381	
490.1	1.509	
592.6	1.643	
716.6	1.783	
866.5	1.929	
1048.0	2.08	
1267.0	2.237	
1532.0	2.397	
1852.0	2.56	
2240.0	2.725	
2708.0	2.891	
3275.0	3.056	
3960.0	3.22	
4788.0	3.379	
5790.0	3.533	
7001.0	3.681	
8465.0	3.819	
10240.0	3.946	
12380.0	4.061	
14970.0	4.16	
18100.0	4.242	
21880.0	4.304	
26460.0	4.345	
31990.0	4.363	
38690.0	4.356	
46780.0	4.323	
56560.0	4.263	
68390.0	4.176	
82700.0	4.063	
-----