pwiDB

Plasma-Surface Interaction Data Set 319

Sputtering of Xe⁺ on Ge(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Ge(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.54	4.457e-30
	33.71	0.0003185
	39.82	0.001441
	47.04	0.003958
	55.56	0.008835
	65.64	0.01752
	77.53	0.032
	91.58	0.05478
	108.2	0.08851
	127.8	0.1354
	150.9	0.1966
	178.3	0.2713
	210.6	0.3574
	248.8	0.4519
	293.9	0.552
	347.1	0.6557
	410.1	0.7623
	484.4	0.8716
	572.2	0.9841
	675.9	1.101
	798.4	1.222
	943.1	1.35
	1114.0	1.484
	1316.0	1.625
	1554.0	1.774
	1836.0	1.93
	2169.0	2.096
	2562.0	2.269
	3026.0	2.452
	3575.0	2.642
	4223.0	2.84
	4988.0	3.047
	5892.0	3.26
	6960.0	3.48
	8221.0	3.705
	9711.0	3.935
	11470.0	4.169
	13550.0	4.405
	16010.0	4.643
	18910.0	4.88
	22330.0	5.115
	26380.0	5.347
	31160.0	5.574
	36810.0	5.793
	43480.0	6.004
	51360.0	6.203
	60670.0	6.389
	71670.0	6.559
	84660.0	6.711

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0838
q = 18.22
mu = 1.729
epsilonL = 1.358e-06
Eth = 28.54

Fit range

E = 28.54 – 100000