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Plasma-Surface Interaction Data Set 318

Sputtering of Kr+ on Ge(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on Ge(pc) at 300 K

angle = 0.0 deg E /eV P
24.00.0
28.450.000122
33.720.0006969
39.970.002232
47.390.005632
56.170.01241
66.590.02494
78.930.04652
93.570.08109
110.90.1322
131.50.2013
155.90.2866
184.80.3836
219.00.4867
259.70.5917
307.80.6963
364.90.8002
432.50.9041
512.71.009
607.81.117
720.51.229
854.11.344
1012.01.465
1200.01.592
1423.01.724
1687.01.862
1999.02.006
2370.02.155
2810.02.309
3330.02.468
3948.02.631
4680.02.797
5548.02.966
6577.03.137
7796.03.309
9242.03.48
10960.03.649
12990.03.816
15400.03.979
18250.04.136
21630.04.286
25650.04.427
30400.04.558
36040.04.676
42720.04.781
50640.04.87
60030.04.942
71160.04.995
84360.05.027

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 24 – 100000