{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ge", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Ge(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1769, "q": 12.88, "mu": 2.015, "epsilonL": 2.862e-06, "Eth": 24}, "E_min": 24, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
24.0	0.0	
28.45	0.000122	
33.72	0.0006969	
39.97	0.002232	
47.39	0.005632	
56.17	0.01241	
66.59	0.02494	
78.93	0.04652	
93.57	0.08109	
110.9	0.1322	
131.5	0.2013	
155.9	0.2866	
184.8	0.3836	
219.0	0.4867	
259.7	0.5917	
307.8	0.6963	
364.9	0.8002	
432.5	0.9041	
512.7	1.009	
607.8	1.117	
720.5	1.229	
854.1	1.344	
1012.0	1.465	
1200.0	1.592	
1423.0	1.724	
1687.0	1.862	
1999.0	2.006	
2370.0	2.155	
2810.0	2.309	
3330.0	2.468	
3948.0	2.631	
4680.0	2.797	
5548.0	2.966	
6577.0	3.137	
7796.0	3.309	
9242.0	3.48	
10960.0	3.649	
12990.0	3.816	
15400.0	3.979	
18250.0	4.136	
21630.0	4.286	
25650.0	4.427	
30400.0	4.558	
36040.0	4.676	
42720.0	4.781	
50640.0	4.87	
60030.0	4.942	
71160.0	4.995	
84360.0	5.027	
-----