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Plasma-Surface Interaction Data Set 317

Sputtering of Ge+ on Ge(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ge+ on Ge(pc) at 300 K

angle = 0.0 deg E /eV P
17.220.0
20.553.153e-05
24.530.0002377
29.280.0009153
34.940.002678
41.70.006722
49.770.01521
59.40.03168
70.890.06105
84.60.1085
101.00.1766
120.50.2631
143.80.3606
171.70.4615
204.90.5608
244.50.657
291.80.7514
348.30.8456
415.60.9415
496.11.041
592.01.144
706.61.253
843.31.367
1006.01.487
1201.01.614
1434.01.746
1711.01.884
2042.02.028
2437.02.176
2909.02.329
3471.02.486
4143.02.646
4945.02.808
5901.02.971
7043.03.135
8406.03.297
10030.03.457
11970.03.613
14290.03.764
17050.03.908
20350.04.043
24290.04.169
28990.04.283
34600.04.383
41300.04.467
49290.04.535
58820.04.583
70210.04.61
83790.04.616

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 17.22 – 100000