{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ge", "surface_phase": "pc", "species": {"text": "Ge+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ge+ on Ge(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3535, "q": 11.8, "mu": 2.348, "epsilonL": 3.538e-06, "Eth": 17.22}, "E_min": 17.22, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
17.22	0.0	
20.55	3.153e-05	
24.53	0.0002377	
29.28	0.0009153	
34.94	0.002678	
41.7	0.006722	
49.77	0.01521	
59.4	0.03168	
70.89	0.06105	
84.6	0.1085	
101.0	0.1766	
120.5	0.2631	
143.8	0.3606	
171.7	0.4615	
204.9	0.5608	
244.5	0.657	
291.8	0.7514	
348.3	0.8456	
415.6	0.9415	
496.1	1.041	
592.0	1.144	
706.6	1.253	
843.3	1.367	
1006.0	1.487	
1201.0	1.614	
1434.0	1.746	
1711.0	1.884	
2042.0	2.028	
2437.0	2.176	
2909.0	2.329	
3471.0	2.486	
4143.0	2.646	
4945.0	2.808	
5901.0	2.971	
7043.0	3.135	
8406.0	3.297	
10030.0	3.457	
11970.0	3.613	
14290.0	3.764	
17050.0	3.908	
20350.0	4.043	
24290.0	4.169	
28990.0	4.283	
34600.0	4.383	
41300.0	4.467	
49290.0	4.535	
58820.0	4.583	
70210.0	4.61	
83790.0	4.616	
-----