Return to search

Plasma-Surface Interaction Data Set 316

Sputtering of Ar+ on Ge(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Ge(pc) at 300 K

angle = 0.0 deg E /eV P
15.577.722e-41
18.625.467e-05
22.270.0004286
26.630.001691
31.850.005018
38.090.01262
45.550.02813
54.470.0563
65.150.1011
77.910.1625
93.180.235
111.40.3107
133.30.3841
159.40.4533
190.60.519
228.00.5829
272.60.6467
326.10.7114
389.90.7781
466.30.8472
557.70.919
667.00.9937
797.71.071
954.01.151
1141.01.234
1364.01.318
1632.01.405
1952.01.492
2334.01.58
2791.01.668
3338.01.756
3992.01.842
4775.01.927
5710.02.008
6829.02.086
8167.02.159
9767.02.227
11680.02.288
13970.02.342
16710.02.387
19980.02.422
23900.02.447
28580.02.461
34180.02.463
40870.02.451
48880.02.427
58460.02.388
69920.02.337
83620.02.273

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 15.57 – 100000