{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ge", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Ge(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2357, "q": 6.299, "mu": 2.393, "epsilonL": 8.85e-06, "Eth": 15.57}, "E_min": 15.57, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
15.57	7.722e-41	
18.62	5.467e-05	
22.27	0.0004286	
26.63	0.001691	
31.85	0.005018	
38.09	0.01262	
45.55	0.02813	
54.47	0.0563	
65.15	0.1011	
77.91	0.1625	
93.18	0.235	
111.4	0.3107	
133.3	0.3841	
159.4	0.4533	
190.6	0.519	
228.0	0.5829	
272.6	0.6467	
326.1	0.7114	
389.9	0.7781	
466.3	0.8472	
557.7	0.919	
667.0	0.9937	
797.7	1.071	
954.0	1.151	
1141.0	1.234	
1364.0	1.318	
1632.0	1.405	
1952.0	1.492	
2334.0	1.58	
2791.0	1.668	
3338.0	1.756	
3992.0	1.842	
4775.0	1.927	
5710.0	2.008	
6829.0	2.086	
8167.0	2.159	
9767.0	2.227	
11680.0	2.288	
13970.0	2.342	
16710.0	2.387	
19980.0	2.422	
23900.0	2.447	
28580.0	2.461	
34180.0	2.463	
40870.0	2.451	
48880.0	2.427	
58460.0	2.388	
69920.0	2.337	
83620.0	2.273	
-----