pwiDB

Plasma-Surface Interaction Data Set 315

Sputtering of Ne⁺ on Ge(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Ge(pc) at 300 K

angle = 0.0 deg	E /eV	P
	14.11	1.692e-34
	16.91	0.0002013
	20.26	0.001164
	24.28	0.003764
	29.1	0.009514
	34.87	0.02072
	41.79	0.04028
	50.08	0.07073
	60.01	0.1127
	71.91	0.1639
	86.17	0.2197
	103.3	0.2761
	123.7	0.3304
	148.3	0.3819
	177.7	0.4311
	212.9	0.4788
	255.2	0.5259
	305.8	0.573
	366.4	0.6205
	439.1	0.6687
	526.2	0.7177
	630.6	0.7674
	755.7	0.8177
	905.5	0.8683
	1085.0	0.9191
	1300.0	0.9697
	1558.0	1.02
	1867.0	1.069
	2238.0	1.116
	2682.0	1.162
	3213.0	1.205
	3851.0	1.245
	4615.0	1.282
	5530.0	1.315
	6627.0	1.343
	7941.0	1.365
	9516.0	1.382
	11400.0	1.393
	13670.0	1.396
	16380.0	1.392
	19620.0	1.381
	23520.0	1.362
	28180.0	1.335
	33770.0	1.3
	40470.0	1.258
	48490.0	1.21
	58110.0	1.156
	69640.0	1.097
	83450.0	1.035

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1485
q = 3.57
mu = 2.006
epsilonL = 2.074e-05
Eth = 14.11

Fit range

E = 14.11 – 100000